| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D125-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D179-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02118
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76811
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D131-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D179-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D131-02 |
| filingDate |
2016-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2022-04-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2022-04-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-107787520-B |
| titleOfInvention |
Ultraplanar spin-coated carbon materials |
| abstract |
A planarization and spin-on-carbon (SOC) composition is provided that fills channels and/or trenches on a substrate while planarizing the surface in a single thin layer coating process. The composition can planarize a range of substrate widths having channels or trenches from about 20 nm to about 220 nm wide and up to about 700 nm deep. These outstanding properties result from the low molecular weight of the polymers used in the material, thermally labile protecting groups on the polymers, and delayed cross-linking reactions. |
| priorityDate |
2015-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |