http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107740069-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-305 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 |
| filingDate | 2017-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-107740069-B |
| titleOfInvention | The preparation of one step of atomic layer deposition has method of molybdenum disulfide film of super lubricating action and products thereof and application |
| abstract | The present invention relates to the MoS that the preparation of one step of atomic layer deposition has super lubricating action 2 Method of film and products thereof and application.Si substrate is cleaned through following manner: after ethyl alcohol, acetone wiping, successively sonic oscillation 5-10 minutes in acetone, deionized water, it is put into after being dried up after being cleaned repeatedly with deionized water again with nitrogen gun in atomic layer deposition system reaction chamber, using Mo (CO) 6 (hexacarbonylmolybdenum) solid source and SH (CH 2 ) 2 SH(dithioglycol) fluid supply, there is the MoS of excellent lubricant effect using the preparation of one step of atomic layer deposition 2 Film.Preparation method of the present invention, without carrying out additional high temperature vulcanized process；It is effectively simplified whole preparation process, under conditions of the auxiliary processes such as unused plasma, obtains the extremely low MoS of coefficient of friction 2 Film, it is easy to accomplish large-scale serial production has important application potential. |
| priorityDate | 2017-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 43.