| abstract |
A method of cooling a liner in a plasma chamber. The recycle gas is contacted with or passed through the liner to cool the liner and preheat the recycle gas. The preheated gas is then recycled through the plasma chamber as part of the plasma formation process. The method also includes: the liner is graphite, the recirculated gas is passed through at least one cooling channel present in the liner, at least one of the cooling channels is covered by at least one removable liner/channel cover, the carbon deposits Formed from hydrocarbons present in the recirculated gas, at least one channel is formed in a helical cooling channel pattern, at least one channel is formed in a substantially straight cooling channel pattern, and a plenum for assisting in creating uniformity in the channel Distributed cooling gas. |