http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107677704-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y15-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y15-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-00 |
| filingDate | 2017-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-107677704-B |
| titleOfInvention | Preparation method of gas sensor made of nanotube material and gas sensor |
| abstract | A preparation method of a gas sensor made of a nanotube material and the gas sensor belong to the technical field of sensors. The sensing element and the compensating element of the gas sensor both comprise Al 2 O 3 Carrier and noble metal modified gamma-Al 2 O 3 A nanotube array; al (Al) 2 O 3 The carrier is provided with a sensitive electrode, the sensitive electrode is welded with a metal lead through an electrode pad, and the gamma-Al is modified by noble metal 2 O 3 Nanotube array in Al 2 O 3 On the bottom surface of the carrier. The method comprises the following steps: using in-situ grown Al 2 O 3 The film-shaped ceramic material is used as a sensor carrier material, a sensor microstructure carrier is formed by a micromachining technology, and Al is added 2 O 3 Gamma-Al is modified in holes of film-shaped material 2 O 3 And forming a sensitive core of the sensitive nanotube array after the noble metal catalyst is added, depositing a platinum film on the surface of the core, and forming a sensitive electrode after photoetching and etching. The sensor core body can realize concentration detection of different types of flammable and explosive gases under the high-temperature condition. |
| priorityDate | 2017-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.