http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107621776-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ade7c98fb2e25128b7be6502b20b48f4 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G04F5-14 |
| filingDate | 2017-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c180ef944bf10f993e8ff4cfd128a04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_079b371e8ae7672e0661d0e7d41eec68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a7acd9a13c52bb282b41afcdb062fcdc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7e1cc04afd1c2b92b9303b1c49ea2ada |
| publicationDate | 2018-01-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-107621776-A |
| titleOfInvention | The atomic air chamber preparation methods of SU 8 based on " comb-tooth-type " microchannel |
| abstract | The present invention relates to the preparation method of chip-scale atomic clock atomic air chamber, specially the atomic air chamber preparation methods of SU 8 based on " comb-tooth-type " microchannel.The atomic air chamber preparation methods of SU 8 based on " comb-tooth-type " microchannel, including the making of air chamber bonded layer substrate, the making of the semiclosed atomic air chamber of " comb-tooth-type " microchannel, the filling of chemical reactant, air chamber thermal bonding and chemical reaction generation element.The present invention proposes a kind of method that polymer of SU 8 based on Low Temperature Thermal bonding technology prepares homogeneity atomic air chamber to solve the problems, such as the technical bottlenecks such as " glass silica glass " conventional atom air chamber poor signal to noise, the bad, complex manufacturing technology of sealing；Meanwhile microchannel susceptible to plugging problem when preparing rubidium simple substance for chemical reaction method, the design philosophy of proposition " comb-tooth-type " microchannel. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113359404-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110759314-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113359404-A |
| priorityDate | 2017-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.