http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107604360-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-18 |
| filingDate | 2017-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-107604360-B |
| titleOfInvention | A kind of selectivity copper corrosion liquid and application |
| abstract | The invention discloses a kind of selective copper corrosion liquid, include by weight percentage: 1~20% oxidant, 0.001~5% stabilizer of hydrogen peroxide, 0.01~10% inorganic acid, 1~4% soluble organic acid divalent mantoquita, 0.01~8% chelating agent and/or corrosion inhibiter, 0.001~3% surfactant and excess water, main group of oxidant becomes hydrogen peroxide.Inorganic acid and soluble organic acid divalent mantoquita is added simultaneously in corrosive liquid, accelerates the pre-reaction of corrosive liquid dissolution copper, helps to realize uniform etching, obtain controllable electrode shape.The invention also discloses a kind of selective copper corrosion liquid partly to lead the application for corroding copper or copper compound layer on chip. |
| priorityDate | 2017-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 77.