| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B27-0911
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-268
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B27-0988
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-352
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-064
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C21D1-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2686 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-268
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B27-09 |
| filingDate |
2013-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2020-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2020-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-107577056-B |
| titleOfInvention |
Customized pupil stop shape for controlling edge profile in laser annealing system |
| abstract |
Embodiments of the invention generally relate to laser annealing systems having optical elements for imaging patterns on a substrate. The optical element may comprise a plurality of holes or a hole that shapes the image to be exposed on the surface of the substrate. The image may be determined by the shape of the aperture in the system of optical elements. |
| priorityDate |
2013-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |