| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fdad00677b9268c26e005a9e03a7b9dd |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7889
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28568
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28562
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B41-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-1037
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0217
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02181
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4966
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-517
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02271
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02592
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4958
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4975
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76801
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66666
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7827
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-42324
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-456
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B41-27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-513
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02636
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-515
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7883
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-40114 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-11582
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-792
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-788
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-11556 |
| filingDate |
2015-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_52623d711777b0517eae75ba97d05759
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cb86c5ef7ed264ac6d183b6435e0a9db
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ee4917b162768c8d7e429f740df8e21f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c1bb25e90ea5040852abd2a788aef74
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_607c30fbfdceb01f0c11dcb5ce27741a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3bd7c9408e3cbde36c21f2ab8f0920ac
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7782f49ae891bb2192686a7160e2ed76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d3f2d225fd489476d638bd2cc6932e7d |
| publicationDate |
2018-01-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-107548520-A |
| titleOfInvention |
Semiconductor memory device and manufacturing method thereof |
| abstract |
Embodiments of the present invention provide a highly reliable semiconductor memory device and a manufacturing method thereof. A semiconductor memory device according to an embodiment includes: a semiconductor pillar extending in a first direction; a first electrode extending in a second direction intersecting with the first direction; and a second electrode provided between the semiconductor pillar and the semiconductor pillar. between the first electrodes; a first insulating film disposed between the semiconductor pillars and the second electrodes; a second insulating film disposed between the first electrodes and the second electrodes and the Both sides of the first electrode in the first direction; and a conductive film provided between the second electrode and the second insulating film and not in contact with the first insulating film. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112420726-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11205661-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111263980-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111263980-B |
| priorityDate |
2015-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |