| abstract |
The ultrasonic vibrator of the present invention includes a plurality of piezoelectric elements, a substrate for inputting and outputting electric signals with respect to the piezoelectric elements, and is provided between the piezoelectric elements and the substrate and electrically connects the piezoelectric elements and the substrate. A plurality of electrodes for signal input and output, a plurality of electrodes provided on the side of the plurality of piezoelectric elements on which the electrodes for signal input and output are arranged, and a plurality of electrodes for attenuating the force generated by the operation of the plurality of piezoelectric elements A backing member, and a plurality of sealing parts for sealing at least a part of the outer surface of an electrical path connecting a substrate and an electrode for signal input and output, a plurality of piezoelectric elements, a plurality of backing members, a part of the substrate, and a plurality of signal The input and output electrodes and the plurality of sealing parts are formed by laminating a plurality of materials constituting the piezoelectric element, the backing material, the substrate, the signal input and output electrodes, and the sealing parts. It is formed by dividing in the stacking direction. |