http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107532286-B

Outgoing Links

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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34
filingDate 2016-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2019-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2019-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-107532286-B
titleOfInvention Lithium-containing transition metal oxide targets
abstract The present invention discloses a method of forming a LiMO 2 (eg LiCoO 2 ) sputtering target (such as a hollow cylindrical target) having a bimodal particle size distribution, which includes a CIP-based method involving, for example, forming or obtaining LiMO2 (e.g. LiCoO2 ) powder; dispersion and grinding (e.g. wet milling); binder introduction; drying (e.g. spray drying) to form granules; CIP processing the granules into molded shapes; A heating cycle of sintering and sintering to form a densified sintered shape. The fabricated targets are suitable for inclusion into a sputtering target assembly (eg, a rotary sputtering target assembly in which a plurality of cylindrical targets are attached to a backing support). The present invention includes the resulting target formed according to the CIP-based method as well as the induction heater-based method for using an added conductive wrap or The conductive layer connects (eg adheres with metal solder) the low conductivity target of LiMO2 (eg LiCoO2 ) to the common backing support.
priorityDate 2015-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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Total number of triples: 36.