http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107532286-B
Outgoing Links
Predicate | Object |
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classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3275 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2004-53 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-612 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-5436 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E60-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-602 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-77 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-01 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-6261 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3414 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B22F3-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3407 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-62695 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01G51-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3491 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-342 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K1-002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3426 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-63 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 |
filingDate | 2016-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2019-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2019-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CN-107532286-B |
titleOfInvention | Lithium-containing transition metal oxide targets |
abstract | The present invention discloses a method of forming a LiMO 2 (eg LiCoO 2 ) sputtering target (such as a hollow cylindrical target) having a bimodal particle size distribution, which includes a CIP-based method involving, for example, forming or obtaining LiMO2 (e.g. LiCoO2 ) powder; dispersion and grinding (e.g. wet milling); binder introduction; drying (e.g. spray drying) to form granules; CIP processing the granules into molded shapes; A heating cycle of sintering and sintering to form a densified sintered shape. The fabricated targets are suitable for inclusion into a sputtering target assembly (eg, a rotary sputtering target assembly in which a plurality of cylindrical targets are attached to a backing support). The present invention includes the resulting target formed according to the CIP-based method as well as the induction heater-based method for using an added conductive wrap or The conductive layer connects (eg adheres with metal solder) the low conductivity target of LiMO2 (eg LiCoO2 ) to the common backing support. |
priorityDate | 2015-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 36.