| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-742
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-117
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76879
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-11462 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68785
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2885
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D7-123
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-001
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67259
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67253
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D21-12 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-54 |
| filingDate |
2017-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2021-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-107460445-B |
| titleOfInvention |
Coating apparatus, method of controlling the same, substrate holder, and storage medium |
| abstract |
The invention provides a coating apparatus, a method of controlling the same, a substrate holder, and a storage medium. A plating apparatus for plating a substrate with a substrate holder having an elastic protrusion for sealing a surface to be plated of the substrate, the plating apparatus comprising: a measuring device configured to measure a deformation state of the elastic protruding portion by measuring at least one of a pressing amount of the elastic protruding portion and a load applied to the elastic protruding portion when the substrate is in physical contact with the elastic protruding portion of the substrate holder; and a control device configured to determine whether or not sealing by the elastic protrusion is normal based on the measured deformation state. |
| priorityDate |
2016-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |