| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-34 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1678
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76838
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1879
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1642
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1655
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1692
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1882
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1639
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32053 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-18 |
| filingDate |
2016-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2020-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2020-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-107429399-B |
| titleOfInvention |
Activation method for silicon substrates |
| abstract |
The present invention relates to an activation composition for activating a silicon substrate, which is an aqueous solution comprising a source of palladium ions, a source of fluoride ions and at least two aromatic acids. The invention further relates to a method for its use and optionally for the subsequent metallization of such treated substrates. The method can be used in semiconductor and solar cell fabrication. |
| priorityDate |
2015-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |