| abstract |
The present invention relates to piezoelectric micro-electromechanical systems, which are micro-electromechanical systems (MEMS) devices comprising piezoelectric stacks on substrates separated by dielectric layers. The piezoelectric stack includes a first piezoelectric layer and a second piezoelectric layer, having a first electrode positioned below the first piezoelectric layer and the contact pad, and an electrode positioned between the first piezoelectric layer and the second piezoelectric layer. second electrode. The first contact extends to the first electrode through the piezoelectric layer and the contact pad, and the second contact extends to the second electrode through the second piezoelectric layer. The contact pad prevents an interface between the first piezoelectric layer and the second piezoelectric layer in the contact opening, thereby preventing the piezoelectric layer from being corroded during contact formation. |