http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107306011-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S5-1237 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S5-12 |
| filingDate | 2016-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-107306011-B |
| titleOfInvention | Side coupling grating of laser, preparation method thereof and laser comprising side coupling grating |
| abstract | A preparation method of a side coupling grating of a laser comprises the following steps of 1: etching to prepare a laser ridge waveguide, making an electron beam lithography alignment mark on a ridge waveguide sample, and coating photoresist on the ridge waveguide sample; step 2: carrying out primary electron beam exposure on two sides of the ridge waveguide coated with the photoresist; and step 3: determining the distance deviation between the grating mask and the ridge waveguide after the electron beam exposure, and correcting the deviation in the grating layout; and 4, step 4: utilizing the corrected grating layout to carry out formal electron beam exposure and development on the sample; and 5: and sputtering metal and stripping to form the side coupling grating. By the preparation method, the perfect feedback grating close to the ridge waveguide can be prepared, a good structural basis is provided for distributed feedback mode selection of the laser, the exposure time of the electron beam is shortened, and the cost is reduced. |
| priorityDate | 2016-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 17.