http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107278235-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-08 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F15-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45525 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F15-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-08 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F15-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F15-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 |
| filingDate | 2015-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-107278235-B |
| titleOfInvention | Methods of producing thin inorganic films |
| abstract | The present invention belongs to the field of methods for producing thin inorganic films on substrates, in particular atomic layer deposition methods. The present invention relates in detail to a method comprising bringing the compound of general formula (I) into a gaseous or aerosol state and depositing the compound of general formula (I) from the gaseous or aerosol state onto a solid substrate, wherein R 1 and R 4 are independently of each other alkyl, aryl or trialkylsilyl, R 2 , R 3 , R 5 and R 6 are independently of each other hydrogen, alkyl, aryl or trialkylsilyl, and n is an integer of 1 to 3, M is Ni or Co, X is a ligand coordinating to M, and m is an integer of 0 to 4. |
| priorityDate | 2014-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 94.