| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02658
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02527
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B33-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-186
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3081
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02647
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-1602
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02376 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B33-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-04 |
| filingDate |
2017-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2021-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-107130293-B |
| titleOfInvention |
Method for manufacturing diamond substrate |
| abstract |
The invention provides a method for manufacturing a diamond substrate, which has less dislocation defects and can inhibit the generation of abnormal growth particles. The method for manufacturing a diamond substrate is characterized by comprising a first step of providing a pattern-shaped diamond on a base surface; a second step of removing the foreign matter adhering to the wall surface of the patterned diamond provided in the first step; and a third step of growing diamond from the patterned diamond provided in the first step, and forming diamond in the pattern gaps in the patterned diamond provided in the first step. |
| priorityDate |
2016-02-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |