| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0214
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-07
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-015
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-019
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-016
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0159 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-008
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-223
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-8238
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-227
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00246 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8238
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-22 |
| filingDate |
2017-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2021-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-107121461-B |
| titleOfInvention |
Integrated capacitive humidity sensor |
| abstract |
The present disclosure provides a semiconductor device consisting of a capacitive humidity sensor, a package consisting of a hermetically sealed device, and a method of forming a capacitive humidity sensor within a semiconductor device, the capacitive humidity sensor consisting of a moisture sensitive polymer layer, the moisture sensitive The polymer layer is electrically grafted to the conductive metal layer positioned on the CMOS substrate or the combined MEMS and CMOS substrate and exposed within the opening through the passivation layer. |
| priorityDate |
2016-02-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |