http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107113973-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-0088 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-1545 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00539 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-0796 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-0088 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-0055 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-00 |
| filingDate | 2015-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-107113973-B |
| titleOfInvention | Decontamination module of a horizontal process line and method for separating and removing decontamination particles from the decontamination module |
| abstract | The invention relates to a decontamination module (1) for a horizontal electrochemical or wet chemical process line for metal deposition, in particular copper deposition, on a substrate to be treated, for decontamination The module (1) is used to remove the sediment, the decontamination module (1) comprises a decontamination container (2) connectable to the decontamination unit (3), a pump (4) and a pump (4) for connecting the pump to the decontamination unit at least a first liquid connection element (5), wherein the pump is coupled to the decontamination unit through the at least first liquid connection element; and wherein a treatment liquid level (6) is provided inside the decontamination module, the treatment liquid level (6) being higher than the pump the water inlet area (7); wherein the decontamination module further comprises at least a first liquid area (9), at least a second adjacent liquid area (10) comprising the water inlet area of the pump, and is arranged in at least the first liquid area At least a first separation element (11) between the at least second liquid region. The invention further relates to a method for the selective separation and subsequent removal of decontamination particles from this decontamination module. |
| priorityDate | 2014-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.