| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7105207ca740add5aa1300e0c7f20a8a |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2059
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3175
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0047 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate |
2015-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8ab26e4fe3b5df318009dc8b13215303
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_01ae552929e1dd99ce51be9e897b3c94
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a75e755894e5b8288b7a2e533cb86238 |
| publicationDate |
2017-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-107111228-A |
| titleOfInvention |
E-beam resist composition |
| abstract |
The present invention relates to electron beam (eBeam) resist compositions, particularly (eBeam) resist compositions useful in the manufacture of integrated circuits. Such resist compositions contain antiscattering compounds that minimize scattering and secondary electron generation, thereby providing very high resolution lithography. Such high-resolution lithography can be used directly on silicon-based substrates to produce integrated circuits, or can alternatively be used to produce lithographic masks (eg, photomasks) to facilitate high-resolution lithography. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111752093-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108351587-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108351587-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111752093-A |
| priorityDate |
2014-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |