http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107110727-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L1-2231 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B2562-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B5-03 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L19-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B2562-0247 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B5-021 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-84 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L27-007 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B5-0008 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L9-125 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L19-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L1-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L13-025 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L13-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L9-0055 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L1-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L9-04 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L9-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L13-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-84 |
| filingDate | 2015-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-107110727-B |
| titleOfInvention | Pressure sensors and differential pressure sensors and mass flow control devices using them |
| abstract | Even when the diaphragm is made of stainless steel, the diaphragm and the strain sensor do not peel off each other and are not easily affected by the ambient temperature of use. Moreover, the sensitivity of the pressure sensor is not only governed by the mechanical properties of the material constituting the diaphragm, but can also The degree of freedom in designing the components constituting the pressure sensor is improved. In order to solve the above technical problems, the pressure sensor of the present invention is characterized by comprising: a diaphragm deformed by the pressure of the fluid; an elastic body covering the entire surface of the diaphragm, and one side of the elastic body is engaged with the diaphragm and a strain sensor that engages the elastic body provided on the other side of the elastic body on the side of the end away from the position corresponding to the center of the diaphragm, to be linked with the deformation of the diaphragm The deformation of the strain sensor is detected as a strain, and the elastic body is composed of a material having a coefficient of linear expansion close to that of the material forming the strain sensor. |
| priorityDate | 2014-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.