| abstract |
Even when stainless steel is used for the diaphragm, the diaphragm and the strain sensor will not peel off from each other, and are not easily affected by the temperature of the operating environment. In addition, the sensitivity of the pressure sensor is not only determined by the mechanical properties of the material constituting the diaphragm, but can Improves the degree of freedom in the design of components that make up the pressure sensor. In order to solve the above technical problems, the pressure sensor of the present invention is characterized in that it includes: a diaphragm deformed by the pressure of the fluid; an elastic body covering the entire surface of the diaphragm, and one side of the elastic body is bonded to the diaphragm and a strain sensor engaged with the elastic body disposed on the other side of the elastic body at an end side away from a position corresponding to the center of the diaphragm, the elastic body interlocked with the deformation of the diaphragm The deformation of the elastic body is detected as a strain, and the elastic body is composed of a material having a linear expansion coefficient close to that of a material forming the strain sensor. |