| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3341
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3174
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31745
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-006 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32715
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02689
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N60-0772
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02315
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3056
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32136
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32522
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30621
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-305 |
| filingDate |
2017-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2021-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-107039228-B |
| titleOfInvention |
Charged Particle Beam Induced Etching |
| abstract |
The present invention relates to charged particle beam induced etching. A micromachining process comprising: exposing a workpiece surface to a precursor gas, the precursor gas including a compound having an acid halide functional group; and irradiating the workpiece surface with a beam in the presence of the precursor gas, the precursor gas at Reacts in the presence of the particle beam to remove material from the workpiece surface. |
| priorityDate |
2016-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |