http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107037094-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36333273e27f0db23ddddbf80ba79ba7 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-414 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-4145 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-414 |
filingDate | 2016-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1da12bcdd1cb7dfc5288b54148461c00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a4c9741efb2ae6381b32d10c1c048cee http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f2d2f4241e8e02a023e863e00c9a012 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_470374b6d53ac08caa1d57a8521f2b26 |
publicationDate | 2017-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CN-107037094-A |
titleOfInvention | Semiconductor devices and its manufacture method |
abstract | There is provided semiconductor structure and forming method thereof.The semiconductor structure includes:Substrate;Grid structure, above the first surface of substrate;And source region and drain region, it is adjacent with grid structure in the substrate.The semiconductor structure also includes:Channel region, is interposed between source region and drain region and below grid structure.The semiconductor structure also includes:First layer, above the second surface relative with first surface of substrate;And the second layer, above first layer.The semiconductor structure also includes:Sense film, above channel region and above at least a portion of first layer and the second layer;And trap, above the sense film and cut off first layer and the second layer. |
priorityDate | 2015-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.