http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107004626-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67248 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6833 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67098 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67109 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67103 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02N13-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H02N13-00 |
| filingDate | 2015-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-107004626-B |
| titleOfInvention | Electrostatic chuck apparatus |
| abstract | The present invention provides a kind of electrostatic chuck apparatus, and in the present invention, the electrostatic chuck apparatus, which has, is divided into multiple heaters, can carry out uniform temperature control to the region heated by each heater in simple structure.In electrostatic chuck apparatus of the present invention, have: electrostatic chuck section has the mounting surface of mounting plate sample on an interarea, and has Electrostatic Absorption electrode；Temperature, which is adjusted, uses base portion, is configured at the side opposite with the mounting surface relative to the electrostatic chuck section, cools down to the electrostatic chuck section；High frequency, which generates, uses electrode, is configured between the electrostatic chuck section and the temperature adjusting base portion with stratiform；High frequency electric source is connected to the high frequency generation electrode；1st heating element, including the multiple primary heaters being configured at stratiform between the high frequency generation electrode and the temperature adjusting base portion；And guard electrode, it is configured between the high frequency generation electrode and the 1st heating element with stratiform. |
| priorityDate | 2014-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.