http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106948002-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-12 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-12 |
| filingDate | 2017-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-106948002-B |
| titleOfInvention | The two-sided base construction of electromagnetic induction heating epitaxial furnace |
| abstract | The invention discloses a kind of two-sided base constructions of electromagnetic induction heating epitaxial furnace, the graphite base of coat of silicon carbide is coated with including surface, the piece hole that the upper surface of the graphite base has several uniformly distributed around axle center has boss corresponding with every a piece of hole in the lower surface of the graphite base.The two-sided base construction can satisfy room temperature load, under the conditions of high-purity atmosphere, the working condition that 1100 DEG C of epitaxial growth temperature, improve the consistency of graphite base temperature, it effectively avoids maintaining the air-flow consistency of substrate surface because resistivity evenness parameter caused by temperature is inconsistent is inconsistent, promoting extension major parameter consistency performance, and skid wire and sliver problem with epitaxial wafer left and right sides in one furnace of batch can be improved, improve product quality. |
| priorityDate | 2017-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.