| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24298
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24314 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6875
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-467 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-687
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 |
| filingDate |
2014-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2020-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2020-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-106935541-B |
| titleOfInvention |
Pad design for electrostatic chuck surface |
| abstract |
Particular embodiments relate to electrostatic chuck surfaces having minimal contact area features. More specifically, embodiments of the present invention provide an electrostatic chuck assembly having a pattern of raised elongated surface features for providing reduced particle generation and reduced wear of a substrate and chucking equipment. |
| priorityDate |
2013-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |