http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106884143-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b4711b7defc1422cdb7f86d2c95657bf |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0036 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-086 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-35 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-35 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-08 |
| filingDate | 2017-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_31cf7f3a7a16cf30d625aec083c4ae5a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c0f9da74c72768c6dc2b6d65500e69e0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_62c9ef16fd8195fd9d97eebd3b104b79 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c109ec7f5663acad86bd431607bf0b8 |
| publicationDate | 2017-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-106884143-A |
| titleOfInvention | A kind of preparation method of the doping molybdenum zinc oxide film with the controllable transmissivity of terahertz wave band |
| abstract | The invention belongs to transparent conductive film technical field, the preparation method of specially a kind of doping molybdenum zinc oxide film in terahertz wave band with controllable transmissivity.The present invention regulates and controls optical characteristics of the doping molybdenum zinc oxide film in terahertz wave band using reactive d.c.magnetron sputtering and annealing technology, specially：Using reactive d.c.magnetron sputtering method, with zinc molybdenum mosaic target as target, with quartz glass as substrate, with Ar Ions Bombardment targets, the doping molybdenum zinc oxide film with polycrystalline structure is formed.Then anneal under given conditions, transmissivity of the regulation doping molybdenum zinc oxide film in terahertz wave band.The inventive method technology stability is good, with IP prospecting. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109128510-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109037860-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112824942-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109037859-A |
| priorityDate | 2017-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.