| abstract |
In a preferred aspect, there is provided an organic coating composition, in particular an antireflective coating composition for use with an overcoated photoresist, the composition comprising 1) one or more glycidyl groups; and 2) one or more aromatic groups, each aromatic group comprising two or more substituents comprising hydroxyl, thiol, and/or amine moieties. Catechol-containing polymers and methods of making the same are also provided. |