http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106811135-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P20-54 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-18 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-18 |
| filingDate | 2017-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-106811135-B |
| titleOfInvention | A kind of oily packet acidic ion liquid polishing fluid for KDP crystal |
| abstract | The present invention provides a kind of oily packet acidic ion liquid polishing fluids for KDP crystal, and the polishing fluid is by oil phase, dispersion phase solvent, acidic ion liquid（AIL）, surfactant and cosurfactant composition.Under the action of surfactant and cosurfactant, AIL solution is covered by as dispersed phase in oil phase, forms oily packet acidic ion liquid microemulsion（AIL/O）.In chemically mechanical polishing, AIL/O microemulsions are squeezed and rubbing action, and AIL molecules break through interfacial film and reach plane of crystal, and chemically react with surface bulge position, realize the selective removal on surface.The AIL/O polishing fluids for KDP crystal of the present invention, simple, property is prepared to stablize, the characteristics of having considered the response characteristic and chemical Mechanical Polishing Technique of KDP crystal, both had the highly selective of microemulsion deliquescence polishing, the advantages of being compatible with organic acid/caustic corrosion polishing again, fly-cutting knife mark can effectively be weakened, reduce surface roughness, and surface noresidue. |
| priorityDate | 2017-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 59.