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filingDate 2015-10-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2021-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2021-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-106796878-B
titleOfInvention Cleaning solution for semiconductor element in which damage of material containing tungsten is suppressed, and cleaning method for semiconductor element using the same
abstract According to the present invention, it is possible to provide a cleaning solution for removing photoresist on the surface of a semiconductor element having a low dielectric constant film (Low-k film) and a material containing 10 atomic % or more of tungsten, The cleaning solution contains 0.001 to 5 mass % of an alkaline earth metal compound, 0.1 to 30 mass % of an inorganic base and/or an organic base, and water.
priorityDate 2014-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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