http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106784044-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1804 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-0224 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-0224 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-09 |
| filingDate | 2016-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-106784044-B |
| titleOfInvention | A three-dimensional structure diamond ultraviolet detector and its preparation method |
| abstract | A three-dimensional structure diamond ultraviolet detector and a preparation method thereof relate to the field of diamond detection science and technology, in particular to a three-dimensional structure diamond ultraviolet detector and a preparation method thereof. In order to solve the problem that the existing diamond ultraviolet detector adopts a planar electrode structure, the longitudinal electric field of the diamond within the range of the ultraviolet penetration depth is too weak to lead out the photogenerated carriers. The boundary hinders the transport of carriers. A three-dimensional diamond ultraviolet detector, including a photosensitive area and an electrode structure, the photosensitive area is a serpentine folded diamond, and the electrode structure is composed of two sets of interdigitated interdigitated grooves, each set of interdigitated structures contains n electrode. A method for preparing a three-dimensional diamond ultraviolet detector: selection of a substrate; pretreatment; preparation of an etching mask; preparation of a three-dimensional electrode structure; deposition of a metal film and post-treatment. The invention is applied to the field of ultraviolet detection. |
| priorityDate | 2016-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.