http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106773329-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-133788 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-1303 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-133711 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1337 |
| filingDate | 2015-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-106773329-B |
| titleOfInvention | Exposure system and exposure method |
| abstract | The invention discloses an exposure system and an exposure method. The exposure system can perform an exposure process on an object and comprises a transfer device and a light source device. The transfer device carries the object. The light source device can emit light to irradiate an object and is provided with a plurality of lamp tube groups which are arranged side by side along a first direction, the plurality of lamp tube groups comprise a first lamp tube group and a second lamp tube group which are adjacent, the first lamp tube group is provided with a first lamp tube and a second lamp tube, the first lamp tube and the second lamp tube respectively extend and are spliced along a second direction which is vertical to the first direction and are provided with a first splicing position, the second lamp tube group is provided with a third lamp tube and a fourth lamp tube, the third lamp tube and the fourth lamp tube respectively extend and are spliced along the second direction and are provided with a second splicing position, and the first splicing position and the second splicing position are staggered in the first direction. By implementing the invention, the exposure uniformity of the object can be lower, thereby achieving the purpose of uniform exposure. |
| priorityDate | 2015-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID166598 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449871035 |
Total number of triples: 14.