http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106664493-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B8-4444 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B8-4488 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B06B1-0629 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B8-4427 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B06B1-0622 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01S15-8925 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-07 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61B8-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R17-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R31-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-09 |
| filingDate | 2015-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-106664493-B |
| titleOfInvention | Ultrasonic sensor and method of making the same |
| abstract | The present invention relates to an ultrasonic sensor and its manufacturing method. The ultrasonic sensor includes: a substrate having at least one opening (18), a vibrating plate (50) provided on the substrate so as to close the opening (18), and a diaphragm (50) provided in parallel in the Y direction. A plurality of first electrodes (14) extending in the X direction orthogonal to the Y direction on the opposite side of the diaphragm (50) to the opening (18) are arranged in parallel along the X direction A plurality of second electrodes (16) extending in the Y direction on the opposite side of the diaphragm (50) to the opening (18), and at least the first electrode (14) and the second electrode (16) A plurality of piezoelectric layers (15) are provided between the first electrode (14) and the second electrode (16) at the intersecting portion, in Z orthogonal to the X direction and the Y direction The part where the first electrode (14), the piezoelectric layer (15) and the second electrode (16) overlap is used as an active part, and the vibration plate (50) can be driven by the active part The vibrating region is used as a movable part, and when a unit composed of one of the movable parts and the above-mentioned active part provided in the one movable part is regarded as an ultrasonic element in a plan view, it is equipped with, in a plan view, Two or more ultrasonic elements having different areas of the active portion with respect to the area of the movable portion. |
| priorityDate | 2014-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.