| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02024
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02021
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1436
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-24 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate |
2015-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2020-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2020-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-106663619-B |
| titleOfInvention |
Composition for polishing silicon wafer |
| abstract |
The invention provides a composition for polishing a silicon wafer, which has excellent performance of reducing haze and low aggregation. The composition for polishing a silicon wafer provided herein comprises an amide group-containing polymer a and an organic compound B containing no amide group. The amide group-containing polymer a has a structural unit S derived from a monomer represented by the following general formula (1) in the main chain. Further, the molecular weight M of the amide group-containing polymer A A With molecular weight M of organic compound B B Satisfies the following equation: m is more than or equal to 200 B <M A 。 |
| priorityDate |
2014-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |