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filingDate 2015-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2020-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2020-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-106660865-B
titleOfInvention Double layer system with partially absorbing layer and method of making the same and sputtering target
abstract Known two-layer layer systems comprise an optically absorbing metal layer facing away from the viewer and a cover layer facing the viewer. The cover layer used as the absorber layer is relatively thick and exhibits the highest possible absorption coefficient. In order to design the production process of this layer system as simply as possible, and to give a sputter deposition method with no or very little addition of reactive gases to the sputtering atmosphere, the invention proposes that the cover layer be shaped as Optically partially absorbing layer having an absorption coefficient kappa of less than 0.7 at a wavelength of 550 nm and a thickness in the range of 30 to 55 nm.
priorityDate 2014-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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