http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106646179-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06744 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2601 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-067 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2016-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-106646179-B |
| titleOfInvention | A kind of semiconductor array component testing method |
| abstract | The present invention relates to a kind of semiconductor array component testing methods, including processing semiconductor array device to be tested, expose tungsten pinned layer；Above the grid conducting layer of semiconductor array device to be tested, interval pre-determined distance is performed etching, until exposing grid conducting layer；Conducting medium is filled at etching, forms supplementary contact；The nano-probe that should be contacted with gate contacts is contacted with supplementary contact, carries out the electrology characteristic test of semiconductor unit in supplementary contact preset range.The beneficial effects of the present invention are: for cannot semiconductor unit corresponding to the drain contact and source contact that be located on tester table with gate contacts simultaneously, the supplementary contact for adding one and gate turn-on in its vicinity be located at this supplementary contact drain contact corresponding with this semiconductor unit and source contact can on tester table simultaneously, with this supplementary contact replacement gate contact, to realize the electrology characteristic for testing this semiconductor unit using nano-probe tester. |
| priorityDate | 2016-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 18.