| abstract |
Nanoelectromechanical (NEMS) devices with nanomagnets are described for improved ranges of operating voltages and improved control of cantilever dimensions. For example, in an embodiment, a nanoelectromechanical (NEMS) device includes a substrate layer, a first magnetic layer disposed over the substrate layer, a first dielectric layer disposed over the first magnetic layer, a first dielectric layer disposed over the first dielectric layer Two dielectric layers, and a cantilever disposed above the second dielectric layer. When a voltage is applied to the cantilever, the cantilever bends from the first position toward the substrate layer to the second position. |