http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106495165-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-1071 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-107 |
| filingDate | 2016-11-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-106495165-B |
| titleOfInvention | A kind of device and method that trichlorosilane is prepared with silicon tetrachloride |
| abstract | The invention discloses a kind of apparatus and method that trichlorosilane is prepared with silicon tetrachloride, device includes sealing flange, variable gasket ring, high pressure and stops circle, dielectric, external electrode and interior electrode, interior electrode is located at axial location, and interior electrode both ends are connected with two sealing flanges respectively；Dielectric both ends connect respectively two sealing flanges and by interior electrode sleeve internally, high pressure stops snare dress on the dielectric, and is closely touched with sealing flange, external electrode tight is in dielectric outer surface；One sealing flange has into conductance mouth, another sealing flange and has conductance mouth.Flexible structure of the present invention, its geometric parameter can be adjusted easily, air-tightness is good, eliminates and is endangered caused by gas leakage；Breakdown voltage can effectively be reduced and plasma is maintained nonequilibrium condition, low temperature plasma can be readily produced, effectively improve the electron density in discharging gap；Opereating specification is wide, can be worked under wider air pressure, voltage, frequency and power. |
| priorityDate | 2016-11-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 35.