| abstract |
First, chlorosilane generates at least one of silanol and silicone compounds (S101).In this operation, for example, so that the inactive gas that moisture concentration is 0.5～2.5ppm is contacted with chlorosilane liquid produced makes moisture dissolve in, by a part for this chlorosilane add water reaction and generate at least one of silanol and silicone compounds.Then, so that the boron-containing compound containing in chlorosilane and silanol or silicone compounds is reacted and make boron-containing compound form boron oxide compound (S102).By this operation (S102), the boron-containing compound as low-boiling compound becomes boron oxide compound as higher-boiling compound, increases with the boiling-point difference of chlorosilane, separation afterwards becomes easy. |