http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106459113-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F15-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45525 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F15-00 |
| filingDate | 2015-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-106459113-B |
| titleOfInvention | The film deposition method of novel ruthenium compound, preparation method, the film deposition precursor composition comprising it and utilization precursor composition |
| abstract | The present invention relates to novel ruthenium compound, the preparation method of the ruthenium compound, the precursor composition for being used to deposit ruthenium containing films comprising the ruthenium compound and utilize the ruthenium containing films deposition method of the precursor composition. |
| priorityDate | 2014-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 88.