http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106395739-B
Outgoing Links
Predicate | Object |
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classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82B3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82B1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y30-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-00 |
filingDate | 2015-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2018-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2018-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CN-106395739-B |
titleOfInvention | A kind of nanoporous tin dioxide thin film gas sensitive and its preparation method and application |
abstract | The invention discloses a kind of preparation methods of nanoporous tin dioxide thin film gas sensitive, using nano-porous gold as growth templates, stannic oxide is deposited, after annealing crystallization, chloroazotic acid corrosion growth templates process using technique for atomic layer deposition, is finally obtained the duplex with nano-porous gold and is led to stannic oxide air-sensitive film.The nanoporous tin dioxide thin film gas sensitive that the present invention is prepared can be used for detecting for detecting nitrogen dioxide, and its optimum working temperature is 300 DEG C;And the air-sensitive responsiveness with ultralow the nitrogen dioxide gas sensitive detection limit and superelevation. |
priorityDate | 2015-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 45.