http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106340540-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0924 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-70 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823437 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823431 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4232 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0886 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-088 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823475 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-785 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0207 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-423 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-70 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78 |
| filingDate | 2015-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-106340540-B |
| titleOfInvention | Semiconductor element and method for filling pattern |
| abstract | The invention discloses a semiconductor element and a method for filling patterns, wherein the semiconductor element comprises: a substrate, wherein the substrate is provided with a unit area, the unit area comprises a first edge and a second edge, and the first edge and the second edge extend along a first direction; and a plurality of patterns disposed on the substrate and extending along a first direction. The plurality of patterns comprise a plurality of first patterns and a plurality of second patterns, and one of the first patterns closest to the first edge and one of the second patterns closest to the second edge are different patterns. |
| priorityDate | 2015-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.