http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106337165-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_099413ae0cf5a2b6398b5151766cd260
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K59-00
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12
filingDate 2016-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5378c13ae996af008ceeefb7341daf09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2c29a3ccf5d0ef2edfe39ac2426da4f6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0ec522946f0bde01b4aadbf82962f1de
publicationDate 2017-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-106337165-A
titleOfInvention Deposition source, deposition device, and display device manufacturing method using deposition device
abstract Provided are a deposition source, a deposition device including the deposition source, and a display device manufacturing method using the deposition device. As an example, the deposition source includes: a plurality of crucibles containing deposition material, a plurality of heaters enclosing each of the plurality of crucibles and independently driven to selectively heat at least one of the plurality of crucibles, A plurality of nozzle parts covering each of the plurality of crucibles and including at least one nozzle, and a case housing the plurality of crucibles, the plurality of nozzle parts, and the plurality of heaters.
priorityDate 2015-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419578768
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422501291
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID417194757
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69329399
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID90594
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21871601
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69667
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420852925
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID101433150
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13887
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID72812
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424543891
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21896096
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11816407
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420664686
http://rdf.ncbi.nlm.nih.gov/pubchem/taxonomy/TAXID8083
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22138074
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15082495
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422975646
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID408241910
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID161213
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID408847131
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407297730
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425270609
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID431760857
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID76030774
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458394673
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425596221
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453841124
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424627568
http://rdf.ncbi.nlm.nih.gov/pubchem/anatomy/ANATOMYID8083
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451101612
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID53629318
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448391725
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID59935133
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15143
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4421864

Total number of triples: 57.