http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106324997-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B19-0095 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-005 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-008 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-006 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B19-0019 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2015-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-106324997-B |
| titleOfInvention | EUV light source, exposure device and integrated rotating construction manufacturing method |
| abstract | A kind of EUV light source, exposure device and integrated rotating construction manufacturing method, wherein EUV light source include：Droplet array, shoot out drop suitable for ring radiation position successively downwards；Lasing light emitter, suitable for producing laser beam, rotation sweep is bombarded the drop for reaching ring radiation position successively, form radiation extreme ultraviolet；Integrated rotating structure, between droplet array and lasing light emitter, including condenser and motor driving shaft, condenser includes the first surface of indent and relative second surface, second surface is connected with motor driving shaft, first surface includes eccentric and inclined elliposoidal reflecting surface and surrounds the non-reflecting surface of elliposoidal reflecting surface, integrated rotating structure is suitable to rotation sweep, eccentric and inclined elliposoidal reflecting surface collects the extreme ultraviolet of radiation, and the gonglion that the extreme ultraviolet of collection is converged at below ring radiation position during rotation sweep.The power increase of the extreme ultraviolet of EUV light source output. |
| priorityDate | 2015-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.