http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106324982-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03B27-62 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03B27-625 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03B27-6242 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-62 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-64 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-82 |
| filingDate | 2015-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-106324982-B |
| titleOfInvention | Mask pellicle indicator for preventing haze |
| abstract | The present invention relates to a mask pellicle indicator for preventing haze. In particular, the present invention provides a pellicle mask assembly comprising a mask, a pellicle frame and a pellicle membrane. The pellicle frame has a bottom side attached to the mask and a top side covered by the pellicle membrane. The pellicle frame includes a coating on an inner surface thereof and the coating is configured to monitor environmental changes inside the pellicle mask assembly. In an embodiment, the environmental change includes increased humidity and/or increased chemical ion density inside the pellicle mask assembly. Methods of making and using the pellicle mask assembly are also disclosed. |
| priorityDate | 2015-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 36.