http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106311682-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B11-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0035 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B5-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B11-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00 |
| filingDate | 2016-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-106311682-B |
| titleOfInvention | System and its sweep-out method are removed in media coating surface contamination based on ionized |
| abstract | The invention discloses a kind of, and system and its sweep-out method are removed in the media coating surface contamination based on ionized, including sample bin, microwave source, vacuum mechanism, gas Flowrate Control System, source of oxygen and noble gas source are provided with outside the sample bin, source of oxygen and noble gas source are connect with gas Flowrate Control System, and microwave source, vacuum mechanism and gas Flowrate Control System are connected to sample bin inside.The system and method can effectively be cleaned for the fingerprint pollution on optical element media coating surface by non-contacting mode, while not cause to damage to film layer, kept the performance of optical element to meet the requirements, do not had residue, will not cause secondary pollution. |
| priorityDate | 2016-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.