http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106283052-B
Outgoing Links
Predicate | Object |
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classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-04 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C28-04 |
filingDate | 2016-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2019-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2019-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CN-106283052-B |
titleOfInvention | A two-dimensional material regulating silicon-carbon composite structure hydrogen barrier coating and preparation method thereof |
abstract | A two-dimensional material regulating silicon-carbon composite structure hydrogen barrier coating, characterized in that: the coating structure comprises silicon-carbon composite and two-dimensional material; wherein, the two-dimensional material coating is two-dimensional structure of graphene, hexagonal nitrogen Boronide or molybdenum disulfide is stacked layer by layer, the number of layers is 1-10 layers, and the thickness of the two-dimensional material coating is 0.34-28nm; wherein, the silicon-carbon composite is sputtered from a silicon carbide target, The thickness range is 0.5‑2µm. The preparation method is as follows: the two-dimensional material is prepared by chemical vapor deposition CVD and ion beam sputtering deposition IBSD technology, combined with etching transfer technology. The composite coating technology is adopted, which has a better hydrogen blocking effect than a single coating; on the basis of the original silicon-carbon composite hydrogen blocking coating, the introduction of two-dimensional materials is proposed for the first time; the existing technical methods are used to design and prepare different forms The composite structure, including the number of layers. |
priorityDate | 2016-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 37.