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filingDate 2016-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2019-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2019-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-106243514-B
titleOfInvention Compositions and methods for patterning
abstract The present application provides a pattern treatment composition comprising a block copolymer and an organic solvent. Patterning methods using the described compositions are also provided. The patterning compositions and methods find particular applicability in semiconductor device fabrication for providing high resolution patterns.
priorityDate 2015-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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