http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106206774-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-50 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-0236 |
| filingDate | 2016-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-106206774-B |
| titleOfInvention | The method that the compound matte of uniform micro-nano is prepared on silicon chip |
| abstract | The invention discloses a kind of method that the compound matte of uniform micro-nano is prepared on silicon chip, including：Cleaning after making herbs into wool, and making herbs into wool；The making herbs into wool includes：Silicon chip is placed in Woolen-making liquid, the scheduled time is soaked in predetermined temperature, obtains the silicon chip with the compound matte of micro-nano；The Woolen-making liquid is made up of copper ion source, hydrofluoric acid, oxidant, surfactant and deionized water；Cleaning after the making herbs into wool includes：Cleaning after making herbs into wool is carried out to silicon chip, removes the metal nanoparticle of silicon chip surface residual.The present invention can prepare the compound matte of uniform micro-nano by a step solwution method on not damaged or low damage silicon chip. |
| priorityDate | 2016-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 108.