http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106158830-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-544 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2016-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-106158830-B |
| titleOfInvention | Self-heating electromigration test structure and wafer-level self-heating electromigration test method |
| abstract | The invention provides a self-heating electromigration test structure and a wafer-level self-heating electromigration test method. The wafer-level self-heating electromigration test structure of the present invention includes: a target metal wire, a first pad and a second pad respectively connected to both ends of the target metal wire, respectively arranged on the front of the first pad and the second pad. The lower third pad and the fourth pad, and the redundant metal line closest to the target metal line connecting the third pad and the fourth pad. |
| priorityDate | 2016-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID482532689 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23985 |
Total number of triples: 13.